LiTaO3（タンタル酸リチウム）は、光学、電子工学、音響分野で広く利用される人工単結晶材料です。特に、非線形光学特性や圧電特性に優れ、さまざまな先端技術の基盤素材として注目されています。ニオブ酸リチウム（LiNbO₃）と類似した物性を持ちながら、熱的・機械的安定性において優れた性能を発揮するため、より過酷な環境や高精度が求められる用途において代替材料として活用されています。
光学グレードLiTaO3基板・ウェーハ
| Material | LiTaO3 wafers (White or Black) | |
|---|---|---|
| Curie Temp | 603 ± 2℃ | |
| Cutting Angle | X/Y/Z etc | |
| Diameter/Size | 2”/3”/4” LT wafer | |
| Tol (±) | <0.20 mm | |
| Thickness | 0.18 ~ 0.5mm or more | |
| Primary Flat | 16 mm / 22 mm / 32 mm | |
| TTV | <3 µm | |
| Warp | <40 µm | |
| Surface Type | Single Side Polished /Double Sides Polished | |
| Polished Side Ra | <0.5 nm | |
| Back Side Criteria | General is 0.2-0.5µm or as customized | |
| Edge Criteria | R = 0.2mm or Bullnose | |
| Optical Doped | Zn/MgO etc | |
| Wafer Surface Criteria | Contamination | None |
| Particles >0.3 µm | ≤30 | |
| Scratch, Chipping | None | |
| Defect | No edge cracks, scratches, saw marks, stains | |
| Packaging | Qty/Wafer box | 25pcs per box |
SAWグレードLiTaO3基板・ウェーハ
| Material | LiTaO3 wafers (White or Black) | |
|---|---|---|
| Curie Temp | 603 ± 2℃ | |
| Cutting Angle | X/Y/Z/X112Y/Y36/Y42/Y48/etc | |
| Diameter/Size | 3”/4”/6" LT Wafer | |
| Tol (±) | <0.20 mm | |
| Thickness | 0.18 ~ 0.5mm or more | |
| Primary Flat | 22 mm / 32 mm / 42.5 mm /57.5 mm | |
| LTV (5 mm × 5 mm) | <1 µm | |
| TTV | <3 µm | |
| Bow | -30 < bow < 30 | |
| Warp (<0.5 µm) | <40 µm | |
| PLTV (<0.5 µm) | ≥95% (5 mm × 5 mm) | |
| Orientation Flat | All Available | |
| Surface Type | Single Side Polished / Double Sides Polished | |
| Polished Side Ra | <0.5 nm | |
| Back Side Criteria | General is 0.2-0.5 µm or as customized | |
| Edge Criteria | R = 0.2 mm or Bullnose | |
| Wafer Surface Criteria | Transmissivity | general: 5.9 × 10-11 < s < 2.0 × 10-10 at 25℃ |
| Contamination | None | |
| Particles >0.3 µm | ≤30 | |
| Scratch, Chipping | None | |
| Defect | No edge cracks, scratches, saw marks, stains | |
| Packaging | Qty/Wafer box | 25pcs per box |